Sputtering Targets
Raw Materials
Description
Metal targets
|
Raw Materials
|
Purity
|
Specification
|
|
(Au)
|
3N,4N,5N
|
plano，cylinder，Step
|
|
(Ag)
|
4N,5N
|
plano，cylinder，Step
|
|
(Cu）
|
3N,3N7,4N,5N,6N
|
plano，cylinder，Step，Tube
|
|
(Al)
|
4N,4N5,5N,6N
|
plano，cylinder，Step，Tube
|
|
(Si)
|
4N,5N
|
plano，cylinder，Step
|
|
(Ti)
|
2N7,3N,4N,4N5
|
plano，cylinder，Step，Tube
|
|
(W)
|
3N,3N5,4N
|
plano，cylinder，Step
|
|
(Cr）
|
2N5,2N8,3N,3N5
|
plano，cylinder，Step，Tube
|
|
(Mo)
|
3N5
|
plano，cylinder，Step
|
|
(Ni)
|
3N,4N
|
plano，cylinder，Step
|
|
(Ge)
|
4N,5N
|
plano，cylinder，Step
|
|
(Eu)
|
2N5,3N,4N
|
plano，cylinder，Step
|
|
(Ce)
|
2N5,3N,3N5
|
plano，cylinder，Step
|
|
(Cd)
|
4N,5N
|
plano，cylinder，Step
|
|
(B)
|
3N,4N,5N
|
plano，cylinder，Step
|
|
(V)
|
3N,4N
|
plano，cylinder，Step
|
|
(Nd)
|
2N5,3N,3N5
|
plano，cylinder，Step
|
|
(Mg)
|
4N
|
plano，cylinder，Step
|
|
(Pt)
|
3N,4N,5N
|
plano，cylinder，Step
|
|
(Se)
|
3N5,4N,5N
|
plano，cylinder，Step
|
|
(In)
|
4N,5N
|
plano，cylinder，Step
|
|
(Zn)
|
4N
|
plano，cylinder，Step
|
|
(C)
|
4N,5N
|
plano，cylinder，Step
|
|
(Sb)
|
4N,5N
|
plano，cylinder，Step
|
|
(Sn)
|
4N
|
plano，cylinder，Step
|
|
(Te)
|
4N,5N
|
plano，cylinder，Step
|
|
(Ta)
|
3N5
|
plano，cylinder，Step
|
|
(La)
|
2N5,3N,3N5
|
plano，cylinder，Step
|
|
(Nb)
|
3N,3N5
|
plano，cylinder，Step
|
|
(Zr)
|
2N5,2N8,3N
|
plano，cylinder，Step
|
|
(Pd)
|
4N,5N
|
plano，cylinder，Step
|
|
(Re)
|
3N,4N
|
plano，cylinder，Step
|
|
(Mn)
|
3N,4N
|
plano，cylinder，Step
|
|
(Ru)
|
3N,4N
|
plano，cylinder，Step
|
Alloy target material
|
Raw Materials
|
Purity
|
Specification
|
|
(ZrO2)
|
4N
|
plano，cylinder，Step，Tube
|
|
(ZnO)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(V2O5)
|
3N
|
plano，cylinder，Step，Tube
|
|
(WO3)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(TiO2)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(TiO)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(SiO)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(Nd2O3)
|
4N
|
plano，cylinder，Step，Tube
|
|
(Mo2O3)
|
3N
|
plano，cylinder，Step，Tube
|
|
(MoO)
|
3N
|
plano，cylinder，Step，Tube
|
|
(MgO)
|
4N
|
plano，cylinder，Step，Tube
|
|
(In2O3)
|
4N,5N
|
plano，cylinder，Step，Tube
|
|
(CuO)
|
4N
|
plano，cylinder，Step，Tube
|
|
(Cr2O3)
|
3N
|
plano，cylinder，Step，Tube
|
|
(Bi2O3)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(Al2O3)
|
4N
|
plano，cylinder，Step，Tube
|
|
(AZO)
|
3N5,4N
|
plano,
|
|
(ITO)
|
4N
|
plano，cylinder，Step，Tube
|
Alloy target material
|
Raw Materials
|
Purity
|
Specification
|
|
(ZnAl)
|
99.99%
|
plano，cylinder，Step，Tube
|
|
(ZrTi)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(ZrNb)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(Wti)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(WRe)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(TiNi)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(TiAl)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(NiV)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(MoSi)
|
99.5%
|
plano，cylinder，Step，Tube
|
|
(InSn)
|
99.99%
|
plano，cylinder，Step，Tube
|
|
(IrRe)
|
99.9%
|
plano，cylinder，Step，Tube
|
|
(IrMn)
|
99.5%
|
plano，cylinder，Step，Tube
|
|
(CuSe)
|
3N5,4N
|
plano，cylinder，Step，Tube
|
|
(CuGa)
|
3N5,4N
|
plano，cylinder，Step，Tube
|
|
(CuIn)
|
4N,5N
|
plano，cylinder，Step，Tube
|
|
(CrSi)
|
3N5,4N
|
plano，cylinder，Step，Tube
|
|
(AlSiCu)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(AlSi)
|
4N,5N
|
plano，cylinder，Step，Tube
|
|
(AlCr)
|
3N5,4N
|
plano，cylinder，Step，Tube
|
|
(CuAl)
|
4N,5N
|
plano，cylinder，Step，Tube
|
|
(NiCrAl)
|
3N,4N
|
plano，cylinder，Step，Tube
|
|
(NiCrSi)
|
3N,3N5,4N
|
plano，cylinder，Step，Tube
|
|
(NiCr)
|
3N,3N5,4N
|
plano，cylinder，Step，Tube
|
|
(TiAl)
|
2N5,3N,4N
|
plano，cylinder，Step，Tube
|
